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Electrostatic drive, method for operating a micromechanical component having an electrostatic drive, and method for manufacturing an electrostatic drive

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Класс H02N1/00 Электростатические генераторы или двигатели с твердым подвижным элементом, несущим электростатические заряды


Классы МПК:H02N1/00 Электростатические генераторы или двигатели с твердым подвижным элементом, несущим электростатические заряды
Автор(ы): Krueger, Michael (Reutlingen, DE)
Njimonzie, Frederic Njikam (Reutlingen, DE)
Muchow, Joerg (Reutlingen, DE)
Патентообладатель(и): Robert Bosch GmbH (Stuttgart, DE)
Приоритеты:
подача заявки
02.02.2010
публикация патента
29.05.2012

РЕФЕРАТ (Abstract)

An electrostatic drive having at least three intermediate frames, each two adjacent intermediate frames being connected to one another via at least one intermediate spring whose longitudinal directions lie on a first axis of rotation, and intermediate electrode fingers being situated on frame girders oriented parallel to the first axis of rotation of the intermediate frames, and having an outer frame that surrounds the intermediate frames and that is connected to the outermost intermediate frame via at least one outer spring whose longitudinal direction lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers being situated on frame girders oriented parallel to the second axis of rotation of the outer frame and of the outermost intermediate frame of the at least three intermediate frames. In addition, a micromechanical component having this electrostatic drive, a method for operating such a micromechanical component, and methods for manufacturing the electrostatic drive and the micromechanical component are described.
Полный текст Патента US 8188634 + PDF


ФОРМУЛА ИЗОБРЕТЕНИЯ (CLAIMS)

What is claimed is:

1. An electrostatic drive, comprising: at least three intermediate frames including at least one first intermediate frame, a second intermediate frame that surrounds the first intermediate frame, and a third intermediate frame that surrounds the first intermediate frame and the second intermediate frame; at least two intermediate springs, each two adjacent intermediate frames of the at least three intermediate frames being connected to one another via at least one of the intermediate springs, the at least two intermediate springs being situated such that longitudinal directions of the intermediate springs lie on a first axis of rotation; intermediate electrode fingers situated on frame girders, the frame girders being oriented parallel to a first axis of rotation of the at least three intermediate frames; an outer frame that surrounds the at least three intermediate frames and that is connected via at least one outer spring to an outermost intermediate frame of the at least three intermediate frames, the at least one outer spring being situated such that a longitudinal direction of the at least one outer spring lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers of the outer frame and of the outermost intermediate frame situated on frame girders oriented parallel to the second axis of rotation.

2. The electrostatic drive as recited in claim 1, wherein the at least three intermediate frames have contact elements that are fashioned for an application of a first voltage to the intermediate electrode fingers, and the at least two intermediate springs are fashioned such that the first intermediate frame is capable of rotation relative to the outer frame about the first axis of rotation through the application of the first voltage, and the outer frame and the outermost intermediate frame of the at least three intermediate frames have further contact elements that are fashioned for an application of a second voltage to the outer electrode fingers, and the at least one outer spring being fashioned such that the first intermediate frame is capable of rotation about the second axis of rotation relative to the outer frame through the application of the second voltage.

3. The electrostatic drive as recited in claim 1, wherein the at least one intermediate spring that connects the first intermediate frame to the second intermediate frame has a first spring rigidity, and the at least one outer spring has a second spring rigidity, the second spring rigidity being greater than the first spring rigidity.

4. The electrostatic drive as recited in claim 1, wherein the intermediate electrode fingers situated on the first intermediate frame have a first length, and the outer electrode fingers situated on the outer frame have a second length, the second length being smaller than the first length.

5. A micromechanical component, comprising: an electrostatic drive, the electrostatic drive including: at least three intermediate frames including at least one first intermediate frame, a second intermediate frame that surrounds the first intermediate frame, and a third intermediate frame that surrounds the first intermediate frame and the second intermediate frame, at least two intermediate springs, each two adjacent intermediate frames of the at least three intermediate frames being connected to one another via at least one of the intermediate springs, the at least two intermediate springs being situated such that longitudinal directions of the intermediate springs lie on a first axis of rotation, intermediate electrode fingers situated on frame girders, the frame girders being oriented parallel to a first axis of rotation of the at least three intermediate frames, and an outer frame that surrounds the at least three intermediate frames and that is connected via at least one outer spring to an outermost intermediate frame of the at least three intermediate frames, the at least one outer spring being situated such that a longitudinal direction of the at least one outer spring lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers of the outer frame and of the outermost intermediate frame situated on frame girders oriented parallel to the second axis of rotation; and a displaceable element connected to the electrostatic drive such that the displaceable element is capable of rotation about the first axis of rotation through application of a first voltage between the intermediate electrode fingers, and the displaceable element is capable of rotation about the second axis of rotation through application of a second voltage between the outer electrode fingers.

6. The micromechanical component as recited in claim 5, wherein the displaceable element is connected to the first intermediate frame via at least one inner spring having a longitudinal direction that lies on the second axis of rotation.

7. The micromechanical component as recited in claim 6, further comprising: a voltage control device that is designed to apply, as the first voltage, a first voltage signal having a first frequency to the intermediate electrode fingers, said first frequency being smaller by at least a factor of two than a natural frequency of an oscillatory movement of the displaceable element and of the at least three intermediate frames relative to the outer frame about the second axis of rotation, and to apply to the outer electrode fingers, as the second voltage, a second voltage signal having a second frequency that corresponds to the natural frequency of the oscillatory movement of the displaceable element and of the at least three intermediate frames relative to the outer frame about the second axis of rotation.

8. A method for operating a micromechanical component having at least three intermediate frames including at least one first intermediate frame, a second intermediate frame that surrounds the first intermediate frame, and a third intermediate frame that surrounds the first intermediate frame and the second intermediate frame, each two adjacent intermediate frames of the micromechanical component further having at least two intermediate springs, the at least three intermediate frames being connected to one another via at least one of the intermediate springs, the at least two intermediate springs being situated such that longitudinal directions of the intermediate springs lie on a first axis of rotation, and intermediate electrode fingers being situated on frame girders, the frame girders being oriented parallel to the first axis of rotation, of the at least three intermediate frames, the micromechanical component further having an outer frame that surrounds the at least three intermediate frames and that is connected via at least one outer spring to an outermost intermediate frame of the at least three intermediate frames, the at least one outer spring being situated such that a longitudinal direction of the at least one outer spring lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers situated on frame girders oriented parallel to the second axis of rotation of the outer frame and of the outermost intermediate frame of the at least three intermediate frames, and a displaceable element that is connected to the first intermediate frame via at least one inner spring that has a longitudinal direction that lies on the second axis of rotation, the method comprising: displacing the displaceable element about the first axis of rotation through application to the intermediate electrode fingers of a first voltage signal having a first frequency that is smaller by at least a factor of two than a natural frequency of an oscillatory movement of the displaceable element and of the at least three intermediate frames about the second axis of rotation relative to the outer frame; and displacing the displaceable element about the second axis of rotation through application to the outer electrode fingers of a second voltage signal having a second frequency that corresponds to the natural frequency of the oscillatory movement of the displaceable element and of the at least three intermediate frames about the second axis of rotation relative to the outer frame.

9. A method for manufacturing an electrostatic drive having at least three intermediate frames, including a first intermediate frame, a second intermediate frame and at least a third intermediate frame, the method comprising: situating the second intermediate frame around the first intermediate frame; situating at least one third intermediate frame about the first intermediate frame and the second intermediate frame, each two adjacent intermediate frames of the at least three intermediate frames being connected to one another via at least one intermediate spring, the at least two intermediate springs being situated such that the longitudinal directions of the intermediate springs lie on a first axis of rotation, and intermediate electrode fingers being situated on frame girders, oriented parallel to the first axis of rotation, of the at least three intermediate frames; and situating an outer frame around the at least three intermediate frames, the outer frame being connected via at least one outer spring to an outermost intermediate frame of the at least three intermediate frames, the at least one outermost spring being situated such that a longitudinal direction of the at least one outermost spring lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers being situated on frame girders oriented parallel to the second axis of rotation of the outer frame and of the outermost intermediate frame of the at least three intermediate frames.

10. The manufacturing method as recited in claim 9, wherein contact elements are situated on the at least three intermediate frames, the contact elements being fashioned for an application of a first voltage to the intermediate electrode fingers, and the at least two intermediate springs being fashioned such that the first intermediate frame of the at least three intermediate frames is rotated relative to the outer frame about the first axis of rotation upon an application of the first voltage, and further contact elements being situated on the outer frame and on the outermost intermediate frame of the at least three intermediate frames, said further contact elements being fashioned for an application of a second voltage to the outer electrode fingers, and the at least one outer spring being fashioned such that the first intermediate frame of the at least three intermediate frames is rotated relative to the outer frame about the second axis of rotation upon an application of the second voltage.

11. A method for manufacturing a micromechanical component, comprising: forming an electrostatic drive, including, situating the second intermediate frame around the first intermediate frame, situating at least one third intermediate frame about the first intermediate frame and the second intermediate frame, each two adjacent intermediate frames of the at least three intermediate frames being connected to one another via at least one intermediate spring, the at least two intermediate springs being situated such that the longitudinal directions of the intermediate springs lie on a first axis of rotation, and intermediate electrode fingers being situated on frame girders, oriented parallel to the first axis of rotation, of the at least three intermediate frames, and situating an outer frame around the at least three intermediate frames, the outer frame being connected via at least one outer spring to an outermost intermediate frame of the at least three intermediate frames, the at least one outermost spring being situated such that a longitudinal direction of the at least one outermost spring lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers being situated on frame girders oriented parallel to the second axis of rotation of the outer frame and of the outermost intermediate frame of the at least three intermediate frames, wherein contact elements are situated on the at least three intermediate frames, the contact elements being fashioned for an application of a first voltage to the intermediate electrode fingers, and the at least two intermediate springs being fashioned such that the first intermediate frame of the at least three intermediate frames is rotated relative to the outer frame about the first axis of rotation upon an application of the first voltage, and further contact elements being situated on the outer frame and on the outermost intermediate frame of the at least three intermediate frames, said further contact elements being fashioned for an application of a second voltage to the outer electrode fingers, and the at least one outer spring being fashioned such that the first intermediate frame of the at least three intermediate frames is rotated relative to the outer frame about the second axis of rotation upon an application of the second voltage; and forming a displaceable element that is connected to the electrostatic drive such that the displaceable element is rotated about the first axis of rotation upon application of the first voltage between the intermediate electrode fingers and is rotated about the second axis of rotation upon application of the second voltage between the outer electrode fingers.


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